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di wu zhang zls 23 xing hai zhi pu jian lou yi jie shao
Pages: 37-42
Year: Issue:  S1
Journal: Vacuum and Cryogenics

Keyword:  质谱室扩散泵机械泵真空系统收集极荷质比节流阀抽速工作原理仪器灵敏度;
Abstract: <正> 一、仪器的工作原理本仪器的工作原理同 JLH—1型一样,是利用质谱分析的原理将不同荷质比的气体离子分开后,收集极上只收集荷质比为4的氦离子。这样,当用氦气进行检漏时,氦气一旦遇到漏孔,仪器输出指示便会发生明显变化,从而指示了漏孔的存在。
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