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yi zhong xin xing kong xin yin ji qiang
Author(s): 
Pages: 129-131
Year: Issue:  2
Journal: Vacuum Science and Technology

Keyword:  聚焦线圈电子束偏转空心阴极辅助阳极结构简单空间利用率偏转线圈镀层质量镀膜室热辐射;
Abstract: 我们在分析各种空心阴极枪结构的基础上研制了枪体结构简单、可以在高真空点燃、对工件没有热辐射的空心阴极枪。可以保证镀层质量、提高镀膜室空间利用率、有利于批量生产。
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