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qing li zi hong ji xia jian she he fan xiang san she de meng te ka luo mo ni
Author(s): 
Pages: 369-374
Year: Issue:  6
Journal: Vacuum Science and Technology

Keyword:  蒙特卡洛模拟离子轰击溅射产额荷能粒子计算程序能量损失靶原子实验值核碰撞反向散射系数;
Abstract: A set of computer programs for Monte Carlo simulations using one or more of the splitting, roulette and statistical estimation techniques or one or two of them and using direct Monte Carlo have been built up. The trajectories of energetic particles and the distribution of energy losses for truncating the particle history in both the traditional way and roulette, the values of the sputtering yield and the backscattering coefficient for the combinations of helium ion and nickel(He~+-Ni) and for the combination of proton and molybdenum (P~+-Mo) calculated using various Monte Carlo techniques and the corresponding computation time have been studied. The results of the calculation have been compared with those of the experiment.
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