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ji pian biao mian chu li dui jin gang shi cheng he mi du ying xiang de yan jiu
Author(s): 
Pages: 276-279
Year: Issue:  4
Journal: Vacuum Science and Technology

Keyword:  Diamond thin filmNucleation densitySubstrate treatmentSEM;
Abstract: In other to study the influence of surface state of substrate on the nucleation density of diamond,various surface treatments of the substrates have been employed, such as polishing, roughing the polished surface,chemically etching the surface and heating the substrates. The effects of different surface treatments are investigated for the nucleation density of diamond. As a result, nucleation density is increased by heating the substrate in the apparatus of low vacuum pressure 10(-1) Pa for remobing SiO2 layer and absorbing activated carbon atoms on the substrate surface. The diamond nucleation density is in the range from 108/cm2 to 109/cm2 by this surface treatment.
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