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kuo san beng pen ju nei fu mian ceng de yan jiu
Pages: 299-303
Year: Issue:  4
Journal: Vacuum Science and Technology

Keyword:  层流附面层附面层厚度蒸气流轴对称喷射速度扩散泵可压缩流体不可压缩粘性流体超音速气流壁面流动;
Abstract: In this paper, we analyze the fluid inside the jet nozzle of diffusion pump using the theory of compressible and viscous fluid mechanics. The calculation results agrees with the experimental result. It reveals the essence of the backstreaming of diffusion pump and provides a theoretical basis for reducing the backstreaming of diffusion pump.
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