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duo jing bao mo ji biao mian ceng de xrd fen xi fang fa tao lun
Author(s): 
Pages: 326-334
Year: Issue:  5
Journal: Vacuum Science and Technology

Keyword:  Thin filmsSurface layerXRDDepth profiling;
Abstract: 对多晶薄膜XRD分析的基本问题小角度衍射几何、非对称平行光束法和Seemann-Bohlin法的衍射几何强度计算,以及P-B法、S-B法对常规XRD分析的适应性进行了分析讨论。并对多晶薄膜XRD分析的当前进展、难点及发展作了分析。提出两种薄膜及表面层表征参量沿深度方向变化的情况下进行XRD深度分布分析的新方法,该方法具有真实深度尺度和定量的特点,并可用于界面分析。
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