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di san zhang hai zhi pu zhen kong jian lou fa de wu li guo cheng
Pages: 22-30
Year: Issue:  S1
Journal: Vacuum and Cryogenics

Keyword:  检漏孔氦质谱检漏仪次级泵质谱室辅助泵真空检漏物理过程灵敏度正确选择抽速;
Abstract: <正> 用氦质谱检漏仪进行检漏的方法有真空法、加压法和背压法三种,它们都有各自的特点和适用对象。然而真空法的应用更为广泛。因此了解这种方法的物理过程,对于正确选择检漏系统、正确运用这种方法和解决检漏中出现的实际问题是非常必要的。
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