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xin xing yang min ceo2-x bao mo de zhi bei ji jie gou yan jiu
Pages: 198-201
Year: Issue:  3
Journal: Vacuum Science and Technology

Keyword:  二氧化铈薄膜结构显微照片;
Abstract: 用射频磁控溅射法制备了CeO2-x高温氧敏薄膜。通过改变O2/Ar比,制备出不同组分和结构的CeO2-x薄膜。用Ce3d的XPS谱计算了Ce3+的浓度。XRD和AFM分析表明,薄膜经空气中高温退火后,形成了立方体CaF2型小晶粒,晶粒大小明显依赖于退火条件和膜厚。
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