Author(s): Zhu Changchun, Huai Yongjin, Li Yumin
Pages: 426-430
Year: 1994 Issue:  6
Journal: Vacuum Science and Technology
Keyword:  各向异性腐蚀; 各向同性腐蚀; 两步法; 硅锥;
Abstract: 详细研究了利用硅的各向异性腐蚀、各向同性腐蚀制备硅锥阴极阵列的工艺。采用快速腐蚀与缓蚀削尖两步工艺，制备出了均匀、尖锐的硅锥阵列。其阵列密度可达106／cm2，硅锥曲率半径可做到20nm。