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liang bu fa fu shi gui zhui yin ji zhen lie de gong yi yan jiu
Pages: 426-430
Year: Issue:  6
Journal: Vacuum Science and Technology

Keyword:  各向异性腐蚀各向同性腐蚀两步法硅锥;
Abstract: 详细研究了利用硅的各向异性腐蚀、各向同性腐蚀制备硅锥阴极阵列的工艺。采用快速腐蚀与缓蚀削尖两步工艺,制备出了均匀、尖锐的硅锥阵列。其阵列密度可达106/cm2,硅锥曲率半径可做到20nm。
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