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aes(rfa) pu xing fen xi ji qi zai mo-si duo ceng mo jie mian yan jiu zhong de ying yong
Author(s): 
Pages: 431-434
Year: Issue:  6
Journal: Vacuum Science and Technology

Keyword:  俄歇谱形多层膜减速场分析器;
Abstract: 应用减速场分析器(RFA)俄歇能谱仪得到直接谱N(E)-E,经计算机程序处理保存谱形方面的信息,并应用于软X射线光学Mo-Si多层膜介面的研究中。并说明经H+离子轰击的界面谱形。
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