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Amorphous and metastable crystalline phases formed by ion beam assisted deposition in the immiscible systems
Author(s): 
Pages: 277-280
Year: Issue:  3
Journal: MATERIALS SCIENCE AND TECHNOLOGY

Keyword:  离子束辅助沉积非晶相亚稳晶相;
Abstract: 利用离子束辅助沉积技术(IBAD)研究了在互不固溶的Cu-Ta和Cu-Nb系统中获得非晶相和亚稳晶相的可能性.结果表明:r(Cu)为30%时Cu含量的Cu-Ta薄膜得到了非晶相;r(Cu)为25%~35%时Cu-Nb薄膜中随辅助离子束能量的改变出现了fcc相-非晶相转变;r(Cu)为20%时Cu-Nb薄膜中得到了bcc相,说明IBAD技术可以在互不固溶二元合金系统中制备非晶和亚稳晶相.非晶或亚稳晶相的形成是由薄膜沉积过程中辅助离子束的作用引起的.
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