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ban dao ti shi min yuan jian de yan zhi
Pages: 103-107
Year: Issue:  1
Journal: Acta Scientiarum Naturalium Universitatis Neimongol

Keyword:  湿敏元件多晶硅半导体相对湿度同类产品非平衡载流子工艺过程干湿球湿度计感应元件电导率;
Abstract: 本文所讨论的多晶硅湿敏元件在国内还没有同类产品,本文介绍了多晶硅湿敏元件的构造、性能、工艺过程,并和国内常用的湿度计作了比较。这种元件具有响应快、灵敏度高、不受环境干扰等优点。
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