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jin shu you ji hua he wu hua xue qi xiang dian ji han zuo ying zhi tu ceng de guo cheng yan jiu
Author(s): 
Pages: 365-370
Year: Issue:  4
Journal: Journal of East China University of Science and Technology(Natural Science Edition)

Keyword:  化学气相淀积氮化钛金属有机化合物化学气相淀积硬质薄膜碳氮化钛;
Abstract: 在垂直冷壁CVD反应器中进行了文题的探索性研究。以二乙胺基钛(Ti(NEt24)为源,在不锈钢或硬质合金基体上完成了氮化钛(TiN)和碳氮化钛(Ti(C,N))硬质薄膜低温下的淀积。发现(TiN)和(Ti(C,N))分别在773K和973K下形成;在操作范围内整个反应器流场由自由对流控制;反应过程由表面过程控制;反应活化能为235 kJ/mol;二乙胺基钛反应级数为1级。进行了热力学计算,提出了反应历程假设。结果表明:用二乙胺基钛进行MOCVD淀积含钛硬质薄膜可以降低温度,以扩大基体的选用范围,为获得硬质薄膜提供了一条新的途径。
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