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cvd jin gang shi mo de duan lie xing wei
Author(s): 
Pages: 119-124
Year: Issue:  3
Journal: Transactions of Materials and Heat Treatment

Keyword:  断裂行为晶粒度缺陷和裂纹金刚石厚膜;
Abstract: 采用球环法研究了用大功率DCPlasmaJetCVD沉积的无衬底自支撑金刚石厚膜的断裂强度和断裂韧度,并试图探索其与原始显微组织特征(特别是晶粒度)的关系。发现CVD金刚石膜的强度和断裂韧度均远低于天然Ⅱa型宝石级金刚石单晶。对于未抛光的试样,数据的离散程度掩盖了任何可能存在的规律性,而对于经过抛光的试样,研究结果表明与众所周知的PetchHal公式有相当好的吻合,说明细化晶粒仍然是提高CVD金刚石膜力学性能的有效途径。预先存在的内部裂纹是CVD金刚石膜强度低的重要原因之一。
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