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Issue:
PREPARATION OF MgB
2
THIN FILMS BY CHEMICAL VAPOR DEPOSITION
Author(s):
WANG SHU-FANGZHOU YUE-LIANGZHU YA-BINLIU ZHENZHANG QINCHEN ZHENG-HAOLU HUI-BINYANG GUO-ZHENLaboratory of Optical Physics
,
Institute of Physics and Center of Condensed Matter Physics
,
Chinese Academy of Sciences
,
Beijing100080
Pages:
230
-
233
Year:
2003
Issue:
S1
Journal:
Chinese Journal of Low Temperature Physics
Keyword:
化学气相沉积
;
MgB2
;
开放实验室
;
中国科学院
;
光物理
;
物理研究所
;
超导薄膜
;
晶粒粒度
;
超导转变温度
;
化学气相沉积技术
;
Abstract:
本文报道了利用化学气相沉积技术制备MgB2 超导薄膜 .首先在MgO(1 1 1 )基片上化学气相沉积一层B膜 ,然后在Mg蒸气环境下对B膜进行后退火处理 .退火后得到的MgB2 薄膜在MgO(1 1 1 )基片上呈随即取向生长 ,Mg、B原子比接近于 1∶2 .4;薄膜表面光滑致密 ,晶粒粒度约为 0 .5μm .电阻测量和直流磁测量表明薄膜超导转变温度为 38K ,转变宽度仅为0 .1K .毕恩公式计算结果显示MgB2 薄膜的临界电流密度在 0T、1 0K时高达 2×1 0 7A/cm2 .
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