Study of nanocrystalline SnO2 transparent conducting film
Author(s): WANG Zhan-he, HAO Qun, ZHU Kan
Pages: 22-23，26
Year: 2001 Issue: 1
Journal: Optical Technique
Keyword: 磁控溅射; SnO2薄膜; 导电特性; 光学透过率;
Abstract: Antimony doped nanocrystalline Tin oxide transparent conducting films grown by d c magnetron sputtering in a mixture gas of Ar and O2, and substrate temperatur e 150～400℃. The films were characterized by X-ray diffracting. The films sh owed preferred orientation in ［110］ or ［211］ plane. The conductivity of fil m s depends on the substrate temperature and Ar/O2. The optical properties were studied by resistivity and transmittance. The research and application prospect s of metallic oxide transparent conducting films were reviewed too.
Pages: 22-23，26
Year: 2001 Issue: 1
Journal: Optical Technique
Keyword: 磁控溅射; SnO2薄膜; 导电特性; 光学透过率;
Abstract: Antimony doped nanocrystalline Tin oxide transparent conducting films grown by d c magnetron sputtering in a mixture gas of Ar and O2, and substrate temperatur e 150～400℃. The films were characterized by X-ray diffracting. The films sh owed preferred orientation in ［110］ or ［211］ plane. The conductivity of fil m s depends on the substrate temperature and Ar/O2. The optical properties were studied by resistivity and transmittance. The research and application prospect s of metallic oxide transparent conducting films were reviewed too.
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