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Electrical Properties of SnO2 and SnO2-Ag Thin Films
Author(s): 
Pages: 9-13
Year: Issue:  1
Journal: VACUUM SCIENCE AND TECHNOLOGY

Keyword:  SnO2薄膜温度调制方式电学特性;
Abstract: SnO2 and SnO2-Ag thin films were prepared by magnetron sputtering on the Si-based membrane substrates embedded with a platinum micro heater.The electrical properties of films were measured in temperature-modulated mode and in simple temperature ramp mode.The results are used to evaluate the effects of Ag addition,environmental humidity and O2 partial pressure on the electrical properties of SnO2 thin films.The variation of film resistance caused by thermally activated processes and by surface chemistry can be separated from the R-T curves measured in temperature-modulated mode.Hence,the analysis of R-T curves in temperature-modulated mode is a new method of studying the effect of surface chemistry on electrical properties and sensing mechanism of the films.
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