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Si3N4 Windows Used in Study of Soft X-ray Contact Imaging in Air
Author(s): 
Pages: 47-50
Year: Issue:  1
Journal: VACUUM SCIENCE AND TECHNOLOGY

Keyword:  软X射线线性吸收系数接触成像氮化硅窗口;
Abstract: The silicon nitride windows have been successfully fabricated for sealing vacuum and transmitting soft X-ray to air.The attenuation of water window soft X-rays through a silicon nitride film,air and water contained in samples was calculated using the experimental data.The experimental results show that the exposure of good imaging in air is about twice as much as that in vacuum for the same sample with 3.2 nm X-rays,in good agreement with the theoretical calculation.The soft X-ray contact image of a fly's wing in air ,adding the images of particles in the silicon nitride film,was recorded simultaneously in photoresist.These should be very useful to the soft X-ray contact microscopy in air and the soft X-ray scanning transmission microscopy.
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