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Pressure Leak Calibration Apparatus
Author(s): 
Pages: 55-59
Year: Issue:  1
Journal: VACUUM SCIENCE AND TECHNOLOGY

Keyword:  真空计量学漏率校准正压漏孔;
Abstract: Pressure leak calibration apparatus is a metrology standard for gas leak rate evaluation.The pressure leak can be calibrated with the constant volume method and the dynamic comparison method of quantitative gas.The calibration ranges 1×102 to 5×10-5 Pa.L/s.
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