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Research of Double-side PSD Technology
Author(s): 
Pages: 93-95,109
Year: Issue:  2
Journal: Electronics Process Technology

Keyword:  Double-side PSDDouble-side lithographyOxidationDiffusion;
Abstract: 双面PSD器件具有很高的灵敏度、良好的瞬态响应特性、紧密的结构以及简单的处理电路等优点。介绍了PSD器件的制作技术。重点介绍了利用微细加工技术进行双面两侧分流电极型PSD的制作,解决了双面对准光刻技术的工艺难题,为双面高精度PSD器件的制作提供了一条工艺技术途径。
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