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Monitor of Ion Implantation in IC Process by Contour Map of Sheet Resistance
Author(s): 
Pages: 410-414
Year: Issue:  6
Journal: MICROELECTRONICS

Keyword:  薄层电阻等值图离子注入集成电路工艺;
Abstract: 主要介绍了测试薄层电阻等值图所反映出IC离子注入工艺存在的种种问题,以及改进结果和进行有效的监控,这对IC生产是非常重要的.
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