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Insulation Improvement of Screen-Printed Dielectric Films by Double-Sintering
Author(s): 
Pages: 104-108
Year: Issue:  2
Journal: Vacuum Science and Technology

Keyword:  丝网印刷 介质层 绝缘特性;
Abstract: 绝缘介质层是三极场致发射显示器的重要组成部分,本文通过丝网印刷技术与一次烧结和重复烧结两种烧结工艺制备不同膜厚的介质层,利用台阶仪和扫描电子显微镜分别对介质层膜厚和形貌进行表征,并对介质层的绝缘耐压性能进行了测试。结果表明,在重复烧结工艺下制备的膜厚约为34μm的介质层的耐压特性较好,电场强度达0.15 MV/cm,可耐压421 V,漏电流小,且重复性好,基本上可以满足后栅型FED栅极调控电压对介质层耐压性能的要求。同时在电场较弱时,介质层漏电流的输运符合欧姆输运机制;随着电场的升高,介质层漏电流的输运以Schottky发射机制为主,Frenkel-Poole发射机制对漏电流的影响很小。
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