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Improvements of Non-Vacuum Accumulation Leak Detection by Helium Mass Spectroscopy
Author(s): 
Pages: 118-122
Year: Issue:  2
Journal: Vacuum Science and Technology

Keyword:  检漏 氦质谱非真空积累检漏法 刚性收集室 柔性收集室;
Abstract: 氦质谱非真空积累检漏法被广泛应用于航天器的总漏率测试中,因此研究氦质谱非真空检漏法具有重要的工程实际意义。本文首次详细给出了氦质谱非真空积累检漏法计算公式的详细推导过程,同时讨论了采用柔性收集室技术可能产生的一些问题。研究结果表明:氦质谱非真空积累检漏法有着严格的理论依据;柔性收集室的技术在理论上是可行的。本文的研究结论可以为氦质谱非真空积累检漏法的工程应用提供理论依据。
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