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Development and Characterization of TiZrV Getter Films
Author(s): 
Pages: 114-117
Year: Issue:  2
Journal: Vacuum Science and Technology

Keyword:  TiZrV薄膜 非蒸散型吸气剂 吸气性能 粒子加速器;
Abstract: TiZrV合金在180℃下加热24 h即可激活,是迄今发现的激活温度最低的非蒸散型吸气剂,已在粒子加速器领域得到应用。采用直流磁控溅射法在不锈钢管道内壁获得了TiZrV薄膜,并研究了薄膜对CO和H2的吸气性能。在200℃下加热24 h后TiZrV对CO和H2的抽速分别为0.23和0.02 L.s-1.cm-2,吸气容量分别为6.8×10-5和6.6×10-2Pa.L.cm-2,且随着激活温度和时间的增加,吸气性能会有所提高。
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