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Impact of Selenization on Microstructures and Properties of CuInSe2 Films
Pages: 140-144
Year: Issue:  2
Journal: Vacuum Science and Technology

Keyword:  太阳能电池 CuInSe2薄膜 磁控溅射 硒化工艺;
Abstract: 采用直流磁控溅射技术,首先在玻璃衬底上制备Mo薄膜,然后制备CuIn预制层。以固态硒粉为硒源,采用硒薄膜法和硒蒸气法两种硒化工艺,经过三步升温硒化方式对CuIn预制膜进行硒化制备CuInSe2薄膜。通过X射线衍射、能量散射谱和扫描电镜测试分析手段,分析CuIn预制膜和每一步硒化热处理后薄膜结构和形貌的变化。结果表明:两种方法硒化后均形成具有单一黄铜矿相结构的CuInSe2薄膜,薄膜具有(112)面择优取向,硒蒸气法形成的晶粒较大,但均匀性差。
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