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Impact of Argon Plasma Treatment on Bioactivity of TiO2 Films Deposited on Nano-Structured Ti Substrates
Author(s): 
Pages: 88-94
Year: Issue:  2
Journal: Vacuum Science and Technology

Keyword:  Ar等离子体处理 直流磁控溅射 TiO2薄膜 纳米晶体钛 生物活性;
Abstract: 采用室温直流磁控溅射技术在纳米晶体钛表面制备TiO2薄膜,并用Ar等离子体对TiO2薄膜进行表面改性,体外模拟体液浸泡实验考察薄膜的生物活性。系统研究了Ar等离子体处理对TiO2薄膜结构、形貌、亲水性、生物活性的影响规律。结果表明:Ar等离子体处理不改变纳米晶体钛表面TiO2薄膜晶体结构(主要为金红石相),但显著改善TiO2薄膜均匀性、光滑性和亲水性。Ar等离子体处理后,TiO2薄膜在模拟体液浸泡中诱导的Ca/P层由球状团簇无定型结构转变为内联多孔网状磷灰石和磷酸八钙相结构,显示优异的生物活性。
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