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Breakdown model of micro channels fabrication in fused silica substrates by laser-induced plasma
Pages: 969-973
Year: Issue:  9
Journal: Laser & Infrared

Keyword:  激光诱导等离子体微通道激光脉冲损伤模型;
Abstract: 利用调Q的Nd:YAG激光器输出的纳秒激光脉冲诱导等离子体加工石英微通道,加工深度可达4.2mm,通道内壁光滑.本文对激光脉冲与物质相互作用的移动损伤模型进行了研究,建立了适用于纳秒激光脉冲诱导等离子体加工石英微通道的损伤模型,利用损伤模型分析了通道特点,模型结果与实验结果基本相符.
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