Author(s): AN Lingling
Pages: 1-4
Year: 2011 Issue:  10
Journal: Journal of Changchun University
Keyword:  photoelectric detection; spatial resolution; polymer coating;
Abstract: 研究了针对于集成电路的聚合物涂层法电光检测技术,测量了模拟和数字的集成电路,从实验上取得了很高的系统空间分辨率。