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Highly Orientated Al Film Grown on LiSbO3 by Ion Beam Assisted Deposition
Author(s): 
Pages: 500-503
Year: Issue:  6
Journal: CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY

Keyword:  高织构铝薄膜离子束辅助沉积入射角机械性能沟道效应;
Abstract: 高性能的铝薄膜因具有低的声阻抗而广泛应用于声表面波器件的制备.本文运用Ar离子束辅助沉积技术,在64°Y-X切向的铌酸锂基片上成功的制备出(111)高度取向的铝薄膜,并研究了Ar离子魄注入角度对薄膜的织构形成的影响.结果表明,薄膜织构度对辅助离子束入射角度非常敏感,在辅助离子束入射角为35°时,薄膜(111)织构最强,电阻率最小,附着力最好,适合于声表面波器件中的应用.
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