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Study of the Charging Compensation on the Al2O3 under Heating
Author(s): 
Pages: 531-534
Year: Issue:  6
Journal: CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY

Keyword:  荷电效应加热Al2O3环境扫描电镜(ESEM);
Abstract: 在环境扫描电镜(ESEM)中配置加热台,对Al2O3样品进行加热实验.结果表明,Al2O3表面的荷电效应随温度的稳定升高而逐渐减小.当温度上升至~360 ℃时,荷电效应完全消除,得到清晰的二次电子(SE)像.在加热过程中,Al2O3样品的吸收电流(Ia)值不断提高,在~360 ℃时达到2.67×10-7 A.这个值相当于Al样品台的Ia值,表明加热可增加Al2O3表面的导电率.此外,在高真空环境中通过加热消除荷电后,得到的Al2O3样品的SE像衬度优于通常在低真空环境中通过电子-离子中和作用得到的图像衬度.
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