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Effect of Annealing on Structural Properties and surface morphologies of ZnO:Al Thin Films
Author(s): 
Pages: 659-662
Year: Issue:  11
Journal: Infrared Technology

Keyword:  退火ZnO:Al薄膜X-射线衍射(XRD)原子力显微镜(AFM);
Abstract: 采用无机盐溶胶-凝胶方法在载玻片衬底上制备了ZnO:Al薄膜,利用X射线衍射(XRD)和原子力显微镜(AFM)研究了退火温度和退火时间对ZnO:Al薄膜结构和形貌的影响.结果显示,ZnO:Al薄膜为六角纤锌矿晶体结构,具有很高的沿C轴的(002)择优取向,随退火温度的升高或退火时间的适当延长,衍射峰的半高宽减小、强度增强,晶粒尺寸增大.结果表明,通过适当控制退火温度和退火时间可以得到高质量的ZnO...
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