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si micromachined gyroscope driven by the rotating carrier
Author(s): 
Pages: 148-152
Year: Issue:  2
Journal: Engineering Sciences

Keyword:  GetLinkList(KeywordFilter('Si anisotropic etching angular velocity emulator')'kw''CJFQ');
Abstract: This paper reports a silicon micromachined gyroscope driven by the rotating carrier's angular velocity. The silicon was manufactured by anisotropic etching. The structure and dynamic formulation are introduced here, with the silicon processing and packing of the sensing element studied. The angular velocity of the rotating carrier is measured by an emulator. The results show that the gyroscope is capable of sense yawing or pitching, and the angular velocity of the rotating carrier itself.
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