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Fabrication of ultraviolet holographic blazed grating
Pages: 1536-1542
Year: Issue:  7
Journal: Optics and Precision Engineering

Keyword:  闪耀光栅紫外光栅衍射效率刻蚀模拟;
Abstract: 通过理论计算研究了影响闪耀光栅衍射效率的因素,并利用离子束刻蚀模拟程序模拟刻蚀闪耀光栅来确定闪耀光栅的制作参数.以理论计算的闪耀光栅参数为依据,以刻蚀模拟程序为指导,基于全息-离子束刻蚀工艺制作了闪耀波长分别为250 nm和330 nm,光栅尺寸分别为85 mm×85 mm,60 mm×60 mm,线密度均为1 200 lp/mm的闪耀光栅.第一种光栅闪耀角为8.54°,非闪耀角为72°,其250...
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