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Realization of Atmospheric Pressure Glow Discharge Ion Source in Small Gap with Precise Electrode Structure
Author(s): 
Pages: 189-194
Year: Issue:  3
Journal: Nanotechnology and Precision Engineering

Keyword:  precision of the electrodesatmospheric pressure glow dischargeambient ion source;
Abstract: 分析了电极结构精密度对大气压辉光放电稳定性的影响,设计并加工了一套高装配精度的线-筒型离子源.内外电极直径分别为0.16 mm和4 mm.当电压达到-3.5 kV时电晕放电开始发生,放电电流波形为典型的特里切尔脉冲;当电压升高至-4.5 kV时放电电流变为直流,表明进入辉光状态.通过放电电流波形可以清晰地观察到从电晕放电到辉光放电的过渡过程,并分析了其物理过程.放电实验表明,该装置可以稳定地实现大...
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