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Optical constant measurement of rough surface alloy steel by ellipsometry
Author(s): WU Yingli, WU Zhensen
Pages: 610-
613
Year: 2008
Issue:
4
Journal: Journal of Applied Optics
Abstract: 采用椭偏法测量入射光波长为0.632 μm,入射角为50°~85°时合金钢的光学常数.考虑材料表面的粗糙度,用Ohlidal-Lukes理论对所测光学常数值进行了修正,发现椭偏参量的修正量随入射角增大而增大.结果表明,测量入射角在50°~70°范围内测量值与修正后计算结果基本一致,在70°~85°范围内测量值与修正后的计算结果差距较大.因此,用椭偏法测量合金钢光学常数时使入射角小于70°,测量结果...
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