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Growth of AI-Doped ZnO Films by Mid Frequency DC nagnetron Sputtering
Author(s): 
Pages: 566-569
Year: Issue:  6
Journal: Journal of Vacuum Science and Technology

Keyword:  中频直流反应磁控溅射掺铝氧化锌薄膜C轴择优取向吸收边;
Abstract: 利用中频直流磁控反应溅射法(MF-DC-MS)在玻璃衬底上制备了掺铝氧化锌(AZO)透明导电薄膜.利用x射线衍射(XRD)、四探针法和分光光度计深入研究了衬底温度对AZO薄膜的结构、电学和光学特性的影响.研究结果表明3h的沉积使AZO薄膜丧失了(002)c轴择优取向.随着衬底温度由210~C升高到270~C,AZO薄膜的电阻率从7.5×1013Qcm降低到2.5×10-3cm.高于270~C后,电...
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