The server is under maintenance between 08:00 to 12:00 (GMT+08:00), and please visit later.
We apologize for any inconvenience caused
Login  | Sign Up  |  Oriprobe Inc. Feed
China/Asia On Demand
Journal Articles
Laws/Policies/Regulations
Companies/Products
Bookmark and Share
The Micro-electro-mechanical System and Its Measurement
Author(s): 
Pages: 16-18
Year: Issue:  1
Journal: MEASUREMENT & CONTROL TECHNOLOGY

Keyword:  微机电系统微机械纳米技术扫描探针显微镜扫描X-射线干涉测量;
Abstract: 微机电系统是基于纳米技术迅速发展起来的新兴技术,在航空、航天、信息、军事、环境控制、医疗、生物工程学等领域有广泛应用.它的巨大潜力将给国家带来难以估量的经济效益和社会效益.本文简要介绍微机电系统技术及相关的测试和控制问题.
Related Articles
No related articles found