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Investigation of CoFeV/TiZr Muitilayer by Polarized Neutron Reflectometry
Pages: 44-49
Year: Issue:  1
Journal: China Nuclear Science and Technology Report

Keyword:  CoFeV/TiZr复合薄膜 极化中子反射;
Abstract: CoFeV/TiZr多层膜界面结构在其极化超镜产品中起着重要的作用。针对膜层需求设计、制备了不同结构的CoFeV/TiZr膜层样品,应用极化中子镜反射技术研究了CoFeV/TiZr复合薄膜材料的膜层结构,获得了薄膜材料的膜层厚度、界面粗糙度、界面扩散层等结构参数。结果表明,多层膜膜层界面粗糙度变化可采用粗糙度递增律进行描述,界面扩散约0.5 nm,膜层制备工艺基本达到预期目标。
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