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Calibration of Ultra-Low Leak Rate with Constant Conductance Technique
Author(s): 
Pages: 358-362
Year: Issue:  5
Journal: Vacuum Science and Technology

Keyword:  真空漏孔 校准装置 固定流导法 四极质谱计;
Abstract: 为了精确校准较小漏率真空漏孔,研制了固定流导法真空漏孔校准装置。在漏孔校准过程中,通过调节稳压室中的压力,很容易使标准气体流量与漏孔漏率非常接近或相等,从而避免四极质谱计的非线性影响。通过实验测试,校准装置的极限真空度为3.7×10-6Pa,漏率校准范围为10-5Pa.m3/s~10-11Pa.m3/s,合成标准不确定度为1.4%~4.2%。
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