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Review of Defects Study of ZnO Films
Pages: 385-391
Year: Issue:  5
Journal: Vacuum Science and Technology

Keyword:  ZnO薄膜 点缺陷 位错 堆垛层错;
Abstract: ZnO是一种新型的Ⅱ-Ⅵ族半导体材料,具有许多优异的性能,可望成为新一代光电材料。但由于ZnO存在许多缺陷从而对它的各种性能产生了不良影响。比如点缺陷会影响ZnO的p型制备,VO可能导致ZnO薄膜产生绿光;线缺陷可能成为载流子陷阱中心和复合中心,影响薄膜器件性能;层错会影响薄膜的能带结构从而影响其光电性能。为制备良好可靠的ZnO薄膜从而实现ZnO光电器件,必须研究ZnO薄膜的缺陷特性,文章对此进行了详细阐述.
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