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The Design and Fabrication of a Multipurpose Thin Film Preparation System
Author(s): 
Pages: 79-80
Year: Issue:  1
Journal: Journal of Yueyang Normal University

Keyword:  真空镀膜 化学气相沉积 多功能;
Abstract: 设计并制作了一套具有真空蒸发沉积和化学气相沉积两种薄膜制备功能的系统。性能参数测试结果表明,该系统既能进行金刚石、BCN材料等物质的化学气相沉积,又具有完好的真空镀膜功能,且该仪器简便直观,操作方便。
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