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Studies of the Mo/B_4C Soft X-ray Multilayers Grown by Magnetron Sputtering
Pages: 67-69
Year: Issue:  2
Journal: Vacuum Science and Technology

Keyword:  软X射线多层膜 磁控溅射 Mo/B4C;
Abstract: 用DC和RF磁控溅射法制备出了波长小于 10nm波段的Mo/B4 C软X射线多层膜反射镜。掠入射X射线衍射仪的测量结果表明 ,磁控溅射法有很高的控制精度 ,制备出的Mo/B4 C软X射线多层膜周期结构非常好 ,表 (界 )面粗糙度非常小 ,约为 0 4nm。
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