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Growth of Photoluminescent Nanometer Si-SiO_x Films by Reactive Evaporation
Pages: 13-17
Year: Issue:  5
Journal: Vacuum Science and Technology

Keyword:  反应蒸发 nmSiSiOx 发光;
Abstract: 报道了用真空反应蒸发制备nmSi/SiOx 薄膜 ,制备出含有不同纳米尺寸硅颗粒的薄膜 ,研究了不同条件下得到的nmSi SiOx 薄膜的结构和组分。实验发现以SiO为蒸发源制备的薄膜能够实现光致发光。初步分析nmSi SiOx 薄膜发光机制可能是由纳米硅量子效应引起的 ,界面效应和缺陷对薄膜PL可能没有贡献 ,解释了有纳米硅颗粒存在但观察不到PL的原因
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