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R&D of Vacuum Measurement with Laser Photoionization
Author(s): 
Pages: 61-63,67
Year: Issue:  5
Journal: Vacuum Science and Technology

Keyword:  激光电离 真空测量 有效电离体积 电离效率;
Abstract: 介绍了激光电离方法在真空测量方面的应用 ,总结了真空的激光电离测量技术的优点和面临的问题
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