Author(s): SHI Xinwei~(*1, 3), LI Xingrui~2, QIU Wanqi~3, LIU Zhengyi~31.physicalscience&technologycollege, ZHENGZHOU University, KEY Laboratoryofmaterialphysics, THE Ministryofeducationofchina(zhengzhouuniversity), zhengzhou, 450052, china, 2.COLLEGE Ofmaterialscienceandengineering, ZHENGZHOU University, zhengzhou, 450052, china, 3.COLLEGE Ofmechanicalengineering, SOUTH Chianuniversityoftechnology, guangzhou, 510641, china
Pages: 330-334
Year: 2006 Issue:  4
Journal: Vacuum Science and Technology
Keyword:  电弧离子镀;  TiN;  复合薄膜;  腐蚀机理;
Abstract: 利用电弧离子镀在高速钢基体上制备了TiN及其复合膜(Ti,Cr)N,通过盐水全浸泡试验测量了薄膜的腐蚀速率,利用SEM观察了薄膜腐蚀后的表面形貌及断口形貌,并用其自带的能谱分析仪测量复合膜中Cr的含量,讨论了带有宏观熔滴颗粒的TiN及其复合膜(Ti,Cr)N的腐蚀机理。结果表明:高速钢表面电弧离子镀TiN和(Ti,Cr)N复合膜均可提高其耐腐蚀性能,薄膜的腐蚀主要有小孔腐蚀、缝隙腐蚀及电偶腐蚀。