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Crystal Characterization of Zinc Oxide Thin Film
Pages: 31-34
Year: Issue:  5
Journal: Vacuum Science and Technology

Keyword:  ZnO 晶体 性能 过渡层;
Abstract: 在硅基上制备出了c轴取向高度一致的ZnO薄膜 ,这将有可能成为新型GaN单晶薄膜的过渡层。对ZnO薄膜的晶体性能进行了分析 ,研究不同衬底和不同衬底温度对ZnO薄膜的结晶状况的影响 ,并着重用TEM研究了硅基ZnO薄膜的晶体性能。
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