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Development of Pressure Leak Calibration System
Pages: 39-41
Year: Issue:  6
Journal: Vacuum Science and Technology

Keyword:  正压漏孔 系统总误差 漏率;
Abstract: 作者对正压漏孔校准方法作了研究 ,为了对不同示漏气体的正压漏孔进行精确校准 ,建立了一套改进型的PΔV/t漏孔校准装置 ,并对该装置进行了不确定度的分析。该装置校准范围 1× 10 -4Pam3 /s~ 1× 10 -7Pam3 /s ,在漏率 2× 10 -6Pam3 /s时系统总误差小于 4 0 %。
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