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Diagnosis of Nitrogen Plasma Generated by High Voltage Pulsed Corona Discharge via Molecular Beam Mass Spectroscopy
Author(s): 
Pages: 20-23
Year: Issue:  5
Journal: Vacuum Science and Technology

Keyword:  脉冲电晕放电 N_2等离子体 分子束质谱 离子检测;
Abstract: 克服强电磁场干扰 ,以具有三级差分抽气系统的分子束质谱为手段 ,对线板式高压脉冲电晕放电N2 等离子体阴极板区的正离子成分进行了首次诊断研究。发现在各种实验条件下 ,N+ 离子流强度均显著大于N+ 2 ;N+ 及N+ 2 离子流强度随放电电压、放电频率升高而增大 ,随放电室气压变化则存在一极值。对N2 等离子体中所包含的主要基元物理 化学过程进行了讨论
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