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Nucleation and Growth of Oriented Diamond Films on Nickel Substrates
Pages: 38-41
Year: Issue:  5
Journal: Vacuum Science and Technology

Keyword:  四步沉积法 成核与生长 金刚石膜;
Abstract: 提出了一种包括晶粒接种、高温退火、成核、生长四过程的薄膜沉积新方法 ,用射频等离子体增强热丝化学气相沉积系统 ,在Ni衬底上制备了定向金刚石膜。通过对成核和生长两过程工艺条件的研究 ,掌握了提高成核密度和金刚石定向生长规律。实验还表明 ,膜与Ni衬底之间未见Ni C H界面层的形成
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