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Structure and Soft Magnetic Properties of Fe-N Films and Fe-N/TiN Multilayers Prepared by DC Magnetron Sputtering
Pages: 9-12
Year: Issue:  5
Journal: Vacuum Science and Technology

Keyword:  结构 磁性 溅射沉积 Fe-N薄膜 Fe-N/TiN多层膜;
Abstract: 用磁控溅射法制备了Fe N薄膜和Fe N/TiN多层膜。结果表明 ,在常温下 ,使用较小的氮、氩比溅射 ,生成的Fe N薄膜主要是含氮α Fe固溶体 ,并且N原子进入α Fe晶格是饱和磁化强度提高的一个原因。Fe N/TiN多层膜的层间耦合作用以及减小每一Fe N层厚度而引起的晶粒尺寸的减小可以有效地降低薄膜的矫顽力 ,从而获得更好的软磁性能
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